convertimate Etch rate

Nanometers per minute to micrometers per minute

Type a value in nm/min to get it in µm/min instantly.

0.1µm/min

That's 2× as fast as sputter deposition, while a plasma etch is 5× faster. A 100 nm layer would take about 1 minutes.

What it means

How fast does it grow?

Rates depend on the material as well as the process, and a recipe that etches oxide quickly may barely touch nitride. That difference is the selectivity.

The math

How to convert nm/min to µm/min

To convert nanometers per minute to micrometers per minute, multiply by 0.001.

Example: 100 nm/min × 0.001 = 0.1 µm/min.

In the other direction, 1 µm/min = 1,000 nm/min.

Every unit

Your rate in every unit

Tables

nm/min to µm/min conversion table

nm/min to µm/min conversion table
nm/minµm/min
0.1 nm/min0.0001 µm/min
1 nm/min0.001 µm/min
5 nm/min0.005 µm/min
10 nm/min0.01 µm/min
50 nm/min0.05 µm/min
100 nm/min0.1 µm/min
250 nm/min0.25 µm/min
500 nm/min0.5 µm/min
1,000 nm/min1 µm/min
5,000 nm/min5 µm/min
µm/min to nm/min conversion table
µm/min to nm/min conversion table
µm/minnm/min
0.1 µm/min100 nm/min
1 µm/min1,000 nm/min
5 µm/min5,000 nm/min
10 µm/min10,000 nm/min
50 µm/min50,000 nm/min
100 µm/min100,000 nm/min
250 µm/min250,000 nm/min
500 µm/min500,000 nm/min
1,000 µm/min1,000,000 nm/min
5,000 µm/min5,000,000 nm/min

Quick answers

Quick answers

How many µm/min is 1 nm/min?
1 nm/min is 0.001 µm/min.
How many µm/min is 10 nm/min?
10 nm/min is 0.01 µm/min.
How many µm/min is 100 nm/min?
100 nm/min is 0.1 µm/min.

The units

About these units

Nanometers per minute (nm/min)

How process recipes are written.

Micrometers per minute (µm/min)

For deep etching and thick films.

Learn more about rate units

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