convertimate Etch rate

Nanometers per minute to monolayers per second

Type a value in nm/min to get it in ML/s instantly.

5.556ML/s

That's 2× as fast as sputter deposition, while a plasma etch is 5× faster. A 100 nm layer would take about 1 minutes.

What it means

How fast does it grow?

Rates depend on the material as well as the process, and a recipe that etches oxide quickly may barely touch nitride. That difference is the selectivity.

The math

How to convert nm/min to ML/s

To convert nanometers per minute to monolayers per second, multiply by 0.0555556.

Example: 100 nm/min × 0.0555556 = 5.55556 ML/s.

In the other direction, 1 ML/s = 18 nm/min.

Every unit

Your rate in every unit

Tables

nm/min to ML/s conversion table

nm/min to ML/s conversion table
nm/minML/s
0.1 nm/min0.00555556 ML/s
1 nm/min0.0555556 ML/s
5 nm/min0.277778 ML/s
10 nm/min0.555556 ML/s
50 nm/min2.77778 ML/s
100 nm/min5.55556 ML/s
250 nm/min13.8889 ML/s
500 nm/min27.7778 ML/s
1,000 nm/min55.5556 ML/s
5,000 nm/min277.778 ML/s
ML/s to nm/min conversion table
ML/s to nm/min conversion table
ML/snm/min
0.1 ML/s1.8 nm/min
1 ML/s18 nm/min
5 ML/s90 nm/min
10 ML/s180 nm/min
50 ML/s900 nm/min
100 ML/s1,800 nm/min
250 ML/s4,500 nm/min
500 ML/s9,000 nm/min
1,000 ML/s18,000 nm/min
5,000 ML/s90,000 nm/min

Quick answers

Quick answers

How many ML/s is 1 nm/min?
1 nm/min is 0.0555556 ML/s.
How many ML/s is 10 nm/min?
10 nm/min is 0.555556 ML/s.
How many ML/s is 100 nm/min?
100 nm/min is 5.55556 ML/s.

The units

About these units

Nanometers per minute (nm/min)

How process recipes are written.

Monolayers per second (ML/s)

Atomic layers a second, at about 0.3 nm each.

Learn more about rate units

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