convertimate Etch rate

Nanometers per minute to ångströms per second

Type a value in nm/min to get it in Å/s instantly.

16.67Å/s

That's 2× as fast as sputter deposition, while a plasma etch is 5× faster. A 100 nm layer would take about 1 minutes.

What it means

How fast does it grow?

Rates depend on the material as well as the process, and a recipe that etches oxide quickly may barely touch nitride. That difference is the selectivity.

The math

How to convert nm/min to Å/s

To convert nanometers per minute to ångströms per second, multiply by 0.166667.

Example: 100 nm/min × 0.166667 = 16.6667 Å/s.

In the other direction, 1 Å/s = 6 nm/min.

Every unit

Your rate in every unit

Tables

nm/min to Å/s conversion table

nm/min to Å/s conversion table
nm/minÅ/s
0.1 nm/min0.0166667 Å/s
1 nm/min0.166667 Å/s
5 nm/min0.833333 Å/s
10 nm/min1.66667 Å/s
50 nm/min8.33333 Å/s
100 nm/min16.6667 Å/s
250 nm/min41.6667 Å/s
500 nm/min83.3333 Å/s
1,000 nm/min166.667 Å/s
5,000 nm/min833.333 Å/s
Å/s to nm/min conversion table
Å/s to nm/min conversion table
Å/snm/min
0.1 Å/s0.6 nm/min
1 Å/s6 nm/min
5 Å/s30 nm/min
10 Å/s60 nm/min
50 Å/s300 nm/min
100 Å/s600 nm/min
250 Å/s1,500 nm/min
500 Å/s3,000 nm/min
1,000 Å/s6,000 nm/min
5,000 Å/s30,000 nm/min

Quick answers

Quick answers

How many Å/s is 1 nm/min?
1 nm/min is 0.166667 Å/s.
How many Å/s is 10 nm/min?
10 nm/min is 1.66667 Å/s.
How many Å/s is 100 nm/min?
100 nm/min is 16.6667 Å/s.

The units

About these units

Nanometers per minute (nm/min)

How process recipes are written.

Ångströms per second (Å/s)

What a deposition rate monitor displays.

Learn more about rate units

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